JPH01149472U - - Google Patents
Info
- Publication number
- JPH01149472U JPH01149472U JP4738988U JP4738988U JPH01149472U JP H01149472 U JPH01149472 U JP H01149472U JP 4738988 U JP4738988 U JP 4738988U JP 4738988 U JP4738988 U JP 4738988U JP H01149472 U JPH01149472 U JP H01149472U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- vacuum chamber
- shaft
- rotation shaft
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4738988U JPH0619570Y2 (ja) | 1988-04-08 | 1988-04-08 | 気相成長装置のサセプタ回転軸冷却構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4738988U JPH0619570Y2 (ja) | 1988-04-08 | 1988-04-08 | 気相成長装置のサセプタ回転軸冷却構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01149472U true JPH01149472U (en]) | 1989-10-17 |
| JPH0619570Y2 JPH0619570Y2 (ja) | 1994-05-25 |
Family
ID=31273599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4738988U Expired - Lifetime JPH0619570Y2 (ja) | 1988-04-08 | 1988-04-08 | 気相成長装置のサセプタ回転軸冷却構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619570Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0367062U (en]) * | 1989-10-31 | 1991-06-28 |
-
1988
- 1988-04-08 JP JP4738988U patent/JPH0619570Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0367062U (en]) * | 1989-10-31 | 1991-06-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619570Y2 (ja) | 1994-05-25 |
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